High-Resolution Sensor Devices Comprising Nanoscale Materials Having Piezoelectric and/or Pyroelectric Properties

Primary Inventors: 

Researchers at the University of Massachusetts Amherst and Yale University have recently developed a novel nanofabrication technology that provides high-resolution (up to ~106 ppi) mechanical and/or thermal sensor devices comprising individual or two-dimensional arrays of nanorods, nanotubes or nanowires. These nanoscale components are produced using polymers having excellent piezoelectric and/or pyroelectric properties, thus, exhibiting high-sensitivity responses to applied mechanical and/or thermal stimuli. This technology can be applied to a wide variety of two-dimensional sensing applications to enable high-resolution sensing currently unachievable with bulk polymer film based technologies. It can also be used for new electronic and biological applications that require mechanical and/or thermal stimuli-responsive nanoscale components or landscapes.

  • Development and fabrication of high-resolution two-dimensional or nanoscale sensors and actuators
  • Detection of two-dimensional thermal and/or mechanical signals
  • Detection of surface images requiring sub-micron resolution
  • High-resolution 2D sensing: Two-dimensional arrays of nanorods, nanotubes or nanowires integrated with electrode arrays can provide high sensor resolutions up to 106 pixels per inch.
  • Nanoscale stimuli-responsive devices: The use of individual nanorods allows for the fabrication of nanoscale devices for easy and direct integration with micro/nano-systems such as MEMS and NEMS.
  • Simple sensor device fabrication process
Licensing Status: 
Available for Licensing or Sponsored Research
Patent Status: 
UMA 08-10
For More Information: 

Ling X. Shen, Ph.D., M.B.A.
Licensing Officer
Commercial Ventures and Intellectual Property
Phone: 413-545-5276
E-mail:  lxshen@research.umass.edu