Invited paper in Proc. SPIE 8467, Nanoepitaxy: Materials and Devices IV

Heterogeneous Integration of Epitaxial Nanostructures: Strategies and Application Drivers

In order to sustain the historic progress in information processing, transmission, and storage, concurrent integration of heterogeneous functionality and materials with fine granularity is clearly imperative for the best connectivity, system performance, and density metrics. In this paper, we review recent developments in heterogeneous integration of epitaxial nanostructures for their applications toward our envisioned device-level heterogeneity using computing nanofabrics.

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