Device Fabrication
Device Fabrication (Marcus Cleanroom): Designed to have CMOS processing technologies to serve as a key enabler towards personalized healthcare and preemptive medicine. Specifically, we aim to develop smart and miniature devices, circuits and systems with biomedical applications such as biosensing, DNA sequencing and smart implanting. This facility supports both discovery-based research and translational research that leads to the development of new research tools for life sciences. The facility includes the following equipment:
- CHA Mark 50 Ebeam Evaporator
- Technic SEMCON 1000
- SB6 Gen2 SUSS MicroTec Wafer Bonder
- AJA ATC-M Series Multi-Technique System
- Oxford PlasmaPro 100 Cobra ICP Etch Systems