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BROWSE BY: Directory | Technical
Research Group | Other
Areas of Research |
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Templating and Deposition Techniques for Nanostructured Materials
We have developed novel templating and deposition techniques for the fabrication
of nanostructures in supercritical fluids (SCFs). Examples include reactive
depostions of metals that afford exceptional purity and step coverage in topologically
complex features. Cu deposition for interconnect stuctures in advanced
ICs is one application. Other examples include the fabrication of robust and
uniform mesoporous metal oxide films with excpetional control over pore order
and orientation. These materials are prepared by the replication of pre-organized
block copolymer templates. The key features of SCFs are the strong temperature
and pressure dependences of their physicochemical properties (density, dielectric
constant, viscosity) and the environmentally benign characteristics of solvents. |
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| Research Interest |
Potential Application |
| Fabrication
of mesoporous metal oxide films with exceptional control over
pore structure, order and orientation using block copolymer
templates |
Ultra-low dielectric constant thin films, bioseparations, catalysis, sensors |
| Reactive deposition of metals and alloys from supercritical carbon dioxide |
Microelectronics
including interconnect structures, gates, memory and storage
devices, catalysis, and sensors |
| Chemical modification
and processing of block copolymers in compressed fluids; polymer
physics in these environments |
Nanostructured materials, photonics, lithography and templates for materials
fabrication |
| Processing using supercritical fluids including carbon dioxide |
Polymer
processing, catalysis, environmentally benign processing |
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| Honors and Awards |
National Science Foundation CAREER Award, 1998
Unilever Award, POLY, PMSE and POLYED Divisions, American Chemical Society, 1998
College of Engineering and Joint Student Engineering Societies Outstanding Advisor Service Award, 1998
David and Lucille Packard Fellow in Science and Engineering, 1998
University Exploratory Research Award, Procter and Gamble Company, 1997
Arthur K. Doolittle Award, Division of Polymeric Materials Science and Engineering, American Chemical Society, 1996 |
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| Publications |
- Pai, R. A.; Humayun, R.; Schulberg, M. T.; Sengupta, A.; Watkins, J. J. “Preparation
of Mesoporous Materials by 3-D Replication of Block Copolymer Templates in
Supercritical Fluids” Science, 2004, 303, 507.
- Blackburn, J. M.; Long, D. L.: Cabanas, A; Watkins, J. J. “Deposition
of Conformal Copper and Nickel Films from Supercritical Carbon Dioxide” Science,
2001, 294, 141.
- Cabanas, A.; Long D. P.; Watkins, J. J. “Deposition of Gold Films
and Nanostructures from Supercritical Carbon Dioxide” Chemistry
of Materials, 2004, 16, 2028.
- Vogt, B. D.; RamachandraRaoV. S.; Gupta, R. R.; Lavery, K. A.; Francis,
T. J.; Russell, T. P.; Watkins, J. J. “Phase Behavior of Polystyrene-block-Poly(n-Alkyl
Methacrylate)s Dilated with Carbon Dioxide” Macromolecules, 2003,
36, 4029.
- Gupta, R. R.; RamachandraRao, V. S.; Watkins, J. J. “Measurement
of Probe Diffusion in CO2-Swollen Polystyrene Using in situ Fluorescence
Nonradiative Energy Transfer” Macromolecules, 2003, 36, 1295.
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